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Type: Artigo de evento
Title: Thermomechanical Properties Of The Amorphous Carbon Nitride Thin Films
Author: Champi A.
Lacerda R.G.
Marques F.C.
Abstract: In this work we investigated thermomechanical properties of carbon nitride thin films. The thermal expansion coefficient and the elastic constants were studied as a function of the nitrogen concentration. Drastic changes of the film structure were observed as a result of the nitrogen incorporation, varied from 0 to 7%. It was observed that the thermal expansion coefficient has a significant increase from about 2 to 9 × 10-6K-1. This results were attributed to the increase in the concentrations of sp2 sites and clusters sizes. © 2003 Elsevier Science Ltd. All rights reserved.
Rights: fechado
Identifier DOI: 10.1016/S0026-2692(03)00046-6
Date Issue: 2003
Appears in Collections:Unicamp - Artigos e Outros Documentos

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