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Type: Artigo de evento
Title: Study Of The Pinhole Density In A-ge:h And A-ge0.9si0.1:h Thin Films
Author: Champi A.
Comedi D.
Abstract: The pinhole density in ion-beam sputtered a-Ge:H and a-Ge0.9Si0.1:H films was measured as a function of the hydrogen content and sample storage time. Films deposited on Corning glass substrates exhibit pinhole densities that increase with the storage time after their deposition. The average pinhole density reaches a saturation value approximately after three weeks, which is between six and several tens of pinholes per mm2 for non-hydrogenated and hydrogenated films, respectively. The time evolution of the pinhole density seems to be associated to the local creep occurring at bubble edges, the bubbles converting into pinholes when the local strain reaches a critical value. © 2002 Elsevier Science B.V. All rights reserved.
Rights: fechado
Identifier DOI: 10.1016/S0022-3093(01)01191-7
Date Issue: 2002
Appears in Collections:Unicamp - Artigos e Outros Documentos

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