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Type: Artigo de periódico
Title: The Subimplantation Model For Diamond-like Carbon Films Deposited By Methane Gas Decomposition
Author: Lacerda R.G.
Marques F.C.
Freire Jr F.L.
Abstract: In this work, the formation of hard a-C:H films deposited on the cathode of an r.f. sputtering system through the decomposition of methane gas was explained using the subimplantation model. Even though in a r.f. plasma deposition the ions striking the films surface are not monoenergetic, the stress data match the theoretical model proposed by C.A. Davis. The stress versus bias plot shows a behavior similar to those already obtained for ta-C and ta-C:H films, which are prepared using monoenergetic ion beam.
Rights: fechado
Identifier DOI: 
Date Issue: 1999
Appears in Collections:Unicamp - Artigos e Outros Documentos

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