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Type: Artigo de periódico
Title: Optimized Electrolyte For Electrochemical Capacitance-voltage Profiling Of Carrier Concentration In In0.49ga0.51p
Author: Da Silva Filho A.
Frateschi N.C.
Abstract: Electrolyte characterization and optimization for the electrochemical capacitance-voltage profiling of carrier concentration in In0.49Ga0.51P is presented. The conditions for operation under minimum electrolyte interference are found based on the complex impedance analysis of an electrolyte-semiconductor junction. Carrier concentration results obtained with the optimized electrolyte are shown to both provide good etch depth control and to agree with Hall measurements. The same optimization scheme may be used for the characterization of other semiconductor material.
Editor: Minerals, Metals & Materials Soc (TMS), Warrendale, PA, United States
Rights: fechado
Identifier DOI: 
Date Issue: 1999
Appears in Collections:Unicamp - Artigos e Outros Documentos

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