Please use this identifier to cite or link to this item: http://repositorio.unicamp.br/jspui/handle/REPOSIP/100151
Type: Artigo de periódico
Title: Structural And Optical Properties Of Plasma-deposited Amorphous Hydrogenated Oxygenated Carbon Films
Author: Durrant S.F.
De Oliveira R.T.
Castro S.G.C.
Bolivar-Marinez L.E.
Galvao D.S.
De Bica Moraes M.A.
Abstract: Amorphous hydrogenated oxygenated carbon (a-C:O:H) films were deposited from C 6H 6/O 2/ He/Ar mixtures in a deposition system fed rf power. The principal variable was the percentage of oxygen in the feed, R ox. Film structure and composition were investigated as a function of R ox using transmission infrared- and x-ray photoelectron spectroscopy. To some degree, greater values of R ox lead to greater incorporation of oxygen functionalities such as OH, C-O, and C=O into the deposited material. As revealed by ultraviolet-visible spectrophotometry, the optical gap E 04 increased from∼3.1 to ∼3.5 eV as R ox was increased from 0% to ∼50%. Semiempirical methods (PM3 and ZINDO-S/CI) allow modeling of the dependence of E 04 on 7 ox. Broad agreement between the results of the experimental and theoretical analyses was obtained. © 1997 American Vacuum Society.
Editor: 
Rights: aberto
Identifier DOI: 10.1116/1.580585
Address: http://www.scopus.com/inward/record.url?eid=2-s2.0-0039685827&partnerID=40&md5=8eb105c191479c0678a150071c12f6e8
Date Issue: 1997
Appears in Collections:Unicamp - Artigos e Outros Documentos

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