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Type: Artigo de periódico
Title: Determination Of Gas Phase Reactive Species By Mass Spectrometry In Chlorine Assisted Hot-filament Chemical Vapor Deposition Of Diamond
Author: Mendes De Barros R.C.
Corat E.J.
Trava-Airoldi V.J.
Ferreira N.G.
Leite N.F.
Lemos V.
Iha K.
Abstract: In this paper we studied the CVD diamond growth from CCl4 mixtures. We observed by mass spectrometry that CCl4 completely dissociates and converts into hydrocarbons and HCl. The quartz microprobe experiments confirm dissociation and shows that the gas phase is completely reacted to its equilibrium for distances larger than 4mm from the gas inlet. The observation of no other chloro-carbon species indicates a fast and short range conversion that probably prevents the participation of chloro-carbon radicals in the growth process. The observation of other chlorinated species in the range from 2 to 4mm may explain the annular regions observed in the growth experiments with gas inlet close to the substrate. Growth experiments have been analysed by Scanning Electron Microscopy (SEM) and Raman Spectroscopy.
Rights: fechado
Identifier DOI: 
Date Issue: 1997
Appears in Collections:Unicamp - Artigos e Outros Documentos

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