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Type: Artigo de periódico
Title: Decomposição de precursores metalorgânicos: uma técnica química de obtenção de filmes finos
Title Alternative: Metallo-organic decomposition: a chemical approach to thin film deposition
Author: Alves, Oswaldo Luiz
Ronconi, Célia Machado
Galembeck, André
Abstract: This review focus the more relevant foundations and applications of the Metallo-Organic Decomposition (MOD) technique, mainly within the last decade. The technique has grown significantly, mainly due to the good results concerning the preparation of multicomponent oxide systems with composition, structural and morphologic control, in a relatively simple way. This opened new opportunities to obtain materials with well-defined electrical and optical properties.
Subject: thin films
metallo-organic decomposition
Editor: Sociedade Brasileira de Química
Citation: Química Nova. Sociedade Brasileira de Química, v. 25, n. 1, p. 69-77, 2002.
Rights: aberto
Identifier DOI: 10.1590/S0100-40422002000100013
Date Issue: 1-Feb-2002
Appears in Collections:Unicamp - Artigos e Outros Documentos

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